nota kerja hari ini
CV207 Ch.A - uniformity o.o.s >2x.
spec <3%.
result 3.3%, 3.4%
action taken:
-ramp down temp from 400 degC to 25degC (setengah hari tunggu)
-lepas jumaat, open chamber & check heater levelling - Ok no problem.
-check wafer drop & pickup - out of pocket.
-do robot calibration, adjust robot ext move out 20 steps - assisted by team member
-test ok
-leak up test - in progress @ 1730hrs
spec <3%.
result 3.3%, 3.4%
action taken:
-ramp down temp from 400 degC to 25degC (setengah hari tunggu)
-lepas jumaat, open chamber & check heater levelling - Ok no problem.
-check wafer drop & pickup - out of pocket.
-do robot calibration, adjust robot ext move out 20 steps - assisted by team member
-test ok
-leak up test - in progress @ 1730hrs
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